Process development execution system

Process development execution systems ( PDES ) are software systems used to guide the development of high-tech manufacturing technologies like semiconductor manufacturing, MEMS manufacturing, photovoltaicsmanufacturing, biomedical devices gold nanoparticle manufacturing. Software systems of this kind have similarities to product lifecycle management (PLM) systems. They guide the development of new or improved technologies from its design, through development and into manufacturing. Furthermore we They borrow concepts of manufacturing execution systems (MES) systems aim tailor em for R & D Rather than for production.


Documented benefits of process development

  • Reduced time to market
  • Reduced amounts of experimentation
  • Improved quality / more robust manufacturing process
  • Reduced prototyping costs
  • Savings through the re-use of original data, information and knowledge
  • A framework for product optimization
  • Reduced waste
  • Savings through the complete integration of engineering workflows
  • Ability to provide collaboration partners with access to a centralized development record

Relationships with other level 3 / level 4 systems

A process development execution system (PDES) is a system for high-tech manufacturing processes. Software systems of this kind leverage diverse concepts from other categories of software like PLM , manufacturing execution system (MES) , ECM goal focus on tools to speed up the technology development Rather than the production.

A PDES is similar to a manufacturing execution systems (MES) in several ways. The key to the development of a manufacturing process is the development of a process for the development of a process. Therefore, the tools and focus of a PDES is on lower volume but higher flexibility and experimentation freedom. The tools of an MES are more focused on less variance, higher volumes, tighter control and logistics. Both types of application softwareincrease traceability, productivity, and quality of the delivered result. For PDESs quality refers to the capability of the process to perform without failure under a wide range of conditions, ie The robustness of the developed manufacturing process. For MESs quality refers to the quality of the manufactured good / commodity. Additionally, the software is used to track the cost of electronic tracking, costing, electronic signature capture, defect and resolution monitoring, executive dashboards , and other various reporting solutions.

In contrast to PLM systems, PDES typically addresses the collaboration and innovation challenges with a bottom-up approach. They start out with the details of manufacturing technologies (like PPLM ), a single manufacturing step with all its physical aware parameterization and integrating steps into sequences, into devices, into systems, etc.

Rather Other similar software categories are management information systems laboratory (LIMS) and laboratory information system (LIS). PDESs offer a wider set of functionalities eg virtual manufacturing techniques, while they are typically not integrated with the equipment in the laboratory.

PDESs have many parts and can be deployed on various scales – from simple Work in Progress tracking, to a complex solution. The lath connects with other enterprise systems like enterprise resource and planning systems(ERP), manufacturing execution systems (MESS), product lifecycle management (PLM), supervisory, control and data acquisition (SCADA) solutions and scheduling and planning systems (both long- Term and short-term tactical).

Example: PDES use during semiconductor device development

New ideas for manufacturing processes (for new goods / commodities or improved manufacturing) are often based on, or can at least benefit from, previous developments and recipes already in use. The MEMS sensor or actuator. A PDES offers an easy way to access these previous developments in a structured manner. Information can be retrieved faster, and previous results can be taken into account more efficiently. A PDES typically offers the means to display and search for results from different viewpoints, and to categorize the data according to different aspects. These functionalities are applied to all result data, such as materials, process steps, machines, experiments, documents and pictures.

In the assembly phase from process steps to process flows, a PDES helps to easily build, store, print, and transfer new process flows. By providing access to previously assembled process flows the designer is able to use those blocks or modules in the newly developed flow. The use of standard building blocks can dramatically reduce the design time and the probability of errors.

A PDES demonstrates its real benefits in the phase verification. Knowledge (for example in the semiconductor device manufacture – clean before deposition, after polymer spin-on no temperature higher than 100 ° C until resist is removed). If a domain expert is not able to do this, then the process can be carried out by the processor. For a PDES, this means it has to be able to

  1. Manage rules
  2. Connect rules with Boolean terms (and, or, not) and
  3. Check process flows using these rules. This rule applies to a newly designed manufacturing flow.

The processing rule does not imply any obligation for the production of the goods. In the area of semiconductor device manufacturing , the technology of semiconductor process simulation / TCAD can Provide an idea about the Produced structures. To support this ‘virtual manufacturing’, a PDES is able to manage simulation models for process steps. Usually the simulation results are seen as standalone data. To rectify this situation PDESs are able to manage the resulting files in combination with the process flow. This allows the engineer to easily compare the expected results with the simulated outcome. The knowledge gained from the comparison can be used to improve the simulation model.

After virtual verification the device is produced in an experimental manufacturing environment. A PDES allows a transfer of the process flow to the manufacturing environment (for example in semiconductor: FAB ). This can be done by simply printing out a runcard for the operator or by interfacing to the Manufacturing Execution Systems (MES) of the facility. On the other hand a PDES is able to manage and document. During and after processing a lot of measurements are taken. The results of these measurements are given in the form of files or rows and columns of data. The PDES is able to manage these files, to link related results together, And to manage different versions of certain files, for example reports. Paired with flexible text, and graphical retrieval and search methods, a PDES provides the mechanism to view and evaluate the accumulated data, information and knowledge from different perspectives. It provides insight into both the aspects aspects of previous developments.

Development activities within high tech industries are an increasingly collaborative effort. This leads to the transfer of the intellectual property from a vendor to a customer. PDESs’ support this transfer while being selective to protect the IPR of the company.

See also

  • microfabrication
  • Semiconductor device manufacturing
  • Microelectromechanical systems
  • Product information management system (PIMS)


  • D. Ortloff, J. Popp, T. Schmidt, and R. Bruck. Process Development Support Environment: A tool for the development of Nanomaterials in NEMS / MEMS devices, 2007
  • T. Schmidt, K. Hahn, T. Binder, J. Popp, A. Wagener, and R. Bruck. OPTIMIZATION OF MEMS FABRICATION PROCESS DESIGN BY VIRTUAL EXPERIMENTS. In Proceedings of SPIE: Micro and Nanotechnology: Materials, Processes, Packaging, and Systems III, Adelaide, Volume 6415, 2006. Smart Materials, Nano and Micro-Smart Systems 2006.
  • NEXUS news. “Successful Outcome from the PROMENADE Project …” , mst | news , April 2008.
  • ICT Results. “A virtual factory for micromachines” , ICT Results , June 2007.
  • Electronics World – High-Tech R & D – Drowning in Data but Starving for Information [1] .

Leave a Comment

Your email address will not be published. Required fields are marked *